![](/img/cover-not-exists.png)
The Use of Micro-Mechanical Techniques, AFM and MFM to Access Surface Deformation in Multilayered Thin Films
Wu, Tsai-Wei, Frommer, JaneVolume:
522
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-522-287
Date:
January, 1998
File:
PDF, 3.49 MB
english, 1998