Thin Film Mechanical Properties Through Nano-Indentation

MRS Proceedings 1998 / 1 Vol. 522

Thin Film Mechanical Properties Through Nano-Indentation

Adhihetty, Indira, Hay, Jennifer, Chen, Wei, Padmanabhan, Paddy
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Volume:
522
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-522-317
Date:
January, 1998
File:
PDF, 597 KB
english, 1998
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