Aluminum Spiking Mechanism in Contact Holes Studied by...

MRS Proceedings 1998 / 1 Vol. 523

Aluminum Spiking Mechanism in Contact Holes Studied by High-Resolution Analytical TEM

Cerva, H., Klüppel, V., Barth, H. J., Helneder, H.
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Volume:
523
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-523-115
Date:
January, 1998
File:
PDF, 5.23 MB
english, 1998
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