Stress Evolution During Growth of Sputtered Ni/Cu...

Stress Evolution During Growth of Sputtered Ni/Cu Multilayers

Ramaswamy, Vidya, Clemens, Bruce M., Nix, William D.
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Volume:
528
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-528-161
Date:
January, 1998
File:
PDF, 781 KB
english, 1998
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