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High-Quality Thin Si Film By Spe Regrowth on Epitaxially Grown Spinel
Kimura, Takafumi, Yamawaki, Hideki, Arimoto, Yoshihiro, Ikeda, Kazuto, Ihara, Masaru, Ozeki, MasashiVolume:
53
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-53-143
Date:
January, 1985
File:
PDF, 1.39 MB
english, 1985