Enhancing the Grain Size and {110} Texture of...

MRS Proceedings 1985 / 1 Vol. 53

Enhancing the Grain Size and {110} Texture of Polycrystalline Si Films By Seed Selection Through Ion Channeling: Implant-Dose Dependence

Kung, Kenneth T-Y., Reif, Rafael
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Volume:
53
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-53-163
Date:
January, 1985
File:
PDF, 664 KB
english, 1985
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