Impact of Silicon Wafer Material on Dislocation Generation...

MRS Proceedings 1998 / 1 Vol. 532

Impact of Silicon Wafer Material on Dislocation Generation in Local Oxidation

Peidous, I. V., Sundaresan, R., Quek, E., Leung, Y. K., Beh, M.
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Volume:
532
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-532-125
Date:
January, 1998
File:
PDF, 1.31 MB
english, 1998
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