Selective Area Growth (SAG) and Epitaxial Lateral Overgrowth (Elo) of GaN Using Tungsten Mask
Kawaguchi, Yasutoshi, Nambu, Shingo, Sone, Hiroki, Yamaguchi, Masahito, Miyake, Hideto, Hiramatsu, Kazumasa, Sawaki, Nobuhiko, Iyechika, Yasushi, Maeda, TakayoshiVolume:
537
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-537-g4.1
Date:
January, 1998
File:
PDF, 1.47 MB
english, 1998