Metallorganic Chemical Vapor Deposition of Ir Films With...

MRS Proceedings 1998 / 1 Vol. 541

Metallorganic Chemical Vapor Deposition of Ir Films With Iridium Acetylacetonate and Carbonyl Precursors

Sun, Y.-M., Endle, J., Smith, K., Ekerdt, J. G., Hance, R. L., Alluri, P., White, J. M.
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Volume:
541
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-541-101
Date:
January, 1998
File:
PDF, 422 KB
english, 1998
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