Chemical Vapor Deposition (CVD) of Iridium and Platinum...

Chemical Vapor Deposition (CVD) of Iridium and Platinum Films and Gas-Phase Chemical Etching of Iridium Thin Films

Xu, Chongying, Dimeo, Frank, Baum, Thomas H., Russell, Michael
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Volume:
541
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-541-129
Date:
January, 1998
File:
PDF, 2.62 MB
english, 1998
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