Chemical Vapor Deposition (CVD) of Iridium and Platinum Films and Gas-Phase Chemical Etching of Iridium Thin Films
Xu, Chongying, Dimeo, Frank, Baum, Thomas H., Russell, MichaelVolume:
541
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-541-129
Date:
January, 1998
File:
PDF, 2.62 MB
english, 1998