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Characterization of Ruo2 Films Prepared by Rf Reactive Magnetron Sputtering
Meng, Li-jian, Santos, M.P. dosVolume:
541
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-541-141
Date:
January, 1998
File:
PDF, 785 KB
english, 1998