Plasma Grafit Polymerized Styrene as an Electron-beam...

MRS Proceedings 1998 / 1 Vol. 544

Plasma Grafit Polymerized Styrene as an Electron-beam Resist

Morita, Shinzo, Ogawa, Shinji, Suzuki, Mikinori, Kashem, Md. Abul
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
544
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-544-141
Date:
January, 1998
File:
PDF, 1.41 MB
english, 1998
Conversion to is in progress
Conversion to is failed