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In SITU Spectroscopic Diagnostics of the Influence of Chamber Wall Polymer on Oxide Etch Rate
Lee, Szetsen, Tien, Yu-Chung, Hsu, Chin-FaVolume:
544
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-544-197
Date:
January, 1998
File:
PDF, 1.37 MB
english, 1998