Conformal Electroless Copper and Nickel Deposition on Mems...

MRS Proceedings 1998 / 1 Vol. 546

Conformal Electroless Copper and Nickel Deposition on Mems Structures

Neves, Hercules P., Kudrle, Thomas D., Chen, Jia-Ming, Adams, Scott G., Maharbiz, Michel, Lopatin, Sergey, MacDonald, N. C.

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Volume:

546

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/proc-546-139

Date:

January, 1998

File:

PDF, 1.62 MB

english, 1998

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