Sic Thin Film Characterization and Stress Measurements for High Temperature Sensors Applications
Gourbeyre, C., Aboughe-nze, P., Malhaire, C., Berre, M. Le, Monteil, Y., Barbieri, D.Volume:
546
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-546-91
Date:
January, 1998
File:
PDF, 1.01 MB
english, 1998