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Microforming of Mems Parts with Amorphous Alloys
Saotome, Yasunori, Zhang, Tao, Inoue, AkihisaVolume:
554
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-554-385
Date:
January, 1998
File:
PDF, 3.03 MB
english, 1998