Fast Deposition of a-Si:H Layers and Solar Cells in a Large-Area (40×40 cm2) VHF-GD Reactor
Kroll, U., Fischer, D., Meier, J., Sansonnens, L., Howling, A., Shah, A.Volume:
557
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-557-121
Date:
January, 1999
File:
PDF, 839 KB
english, 1999