A Novel Excimer Laser Crystallization Method of Poly-Si...

A Novel Excimer Laser Crystallization Method of Poly-Si Thin Film by Grid Line Electron Beam Irradiation

Park, C-M, Lee, M-C, Jeon, J-H, Han, M-K
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Volume:
557
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-557-171
Date:
January, 1999
File:
PDF, 1.17 MB
english, 1999
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