A Novel Two-Pass Excimer Laser Crystallization Process to Obtain Homogeneous Large Grain Polysilicon
Mariucci, L., Carluccio, R., Pecora, A., Foglietti, V., Fortunato, G., Sala, D.DellaVolume:
558
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-558-175
Date:
January, 1999
File:
PDF, 5.25 MB
english, 1999