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Room Temperature Self-Annealing of Electroplated and Sputtered Copper Films
Chen, Michelle, Rengarajan, Suraj, Hey, Peter, Dordi, Yezdi, Zhang, Hong, Hashim, Imran, Ding, Peijun, Chin, BarryVolume:
562
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-562-249
Date:
January, 1999
File:
PDF, 3.16 MB
english, 1999