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In-Situ Study of the Oxide Mediated Epitaxy of CoSi2 on Si
Kleinschmit, M. W., Yeadon, M., Gibson, J. M.Volume:
564
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-564-135
Date:
January, 1999
File:
PDF, 1.42 MB
english, 1999