A Beem Study of PtSi Schottky Contacts on Ion-Milled Si

MRS Proceedings 1999 / 1 Vol. 564

A Beem Study of PtSi Schottky Contacts on Ion-Milled Si

Ru, Guo-Ping, Detavernier, C., Donaton, R. A., Blondeel, A., Clauws, P., Meirhaeghe, R. L. Van, Cardon, F., Maex, K., Qu, Xin-Ping, Zhu, Shi-Yang, Li, Bing-Zong
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Volume:
564
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-564-201
Date:
January, 1999
File:
PDF, 729 KB
english, 1999
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