Integration of Low Dielectric Constant Materials in...

MRS Proceedings 1999 / 1 Vol. 564

Integration of Low Dielectric Constant Materials in Advanced Aluminum and Copper Interconnects

Zhao, Bin, Brongo, Maureen
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Volume:
564
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-564-485
Date:
January, 1999
File:
PDF, 2.91 MB
english, 1999
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