Integration Issues for Low Dielectric Constant Materials in...

MRS Proceedings 1999 / 1 Vol. 564

Integration Issues for Low Dielectric Constant Materials in each Generation of ULSI's

Gomi, Hideki, Kishimoto, Koji, Usami, Tatsuya, Koyanagi, Ken-ichi, Yokoyama, Takashi, Oda, Noriaki, Matsubara, Yoshihisa
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
564
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-564-509
Date:
January, 1999
File:
PDF, 2.81 MB
english, 1999
Conversion to is in progress
Conversion to is failed