Low Dielectric Constant Sicoh Films As Potential Candidates...

MRS Proceedings 1999 / 1 Vol. 565

Low Dielectric Constant Sicoh Films As Potential Candidates for Interconnect Dielectrics

Grill, A., Perraud, L., Patel, V., Jahnes, C., Cohen, S.
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Volume:
565
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-565-107
Date:
January, 1999
File:
PDF, 538 KB
english, 1999
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