Integration Issues for Low Dielectric Constant Materials in each Generation of ULSI'S
Gomi, Hideki, Kishimoto, Koji, Usami, Tatsuya, Koyanagi, Ken-ichi, Yokoyama, Takashi, Oda, Noriaki, Matsubara, YoshihisaVolume:
565
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-565-161
Date:
January, 1999
File:
PDF, 2.42 MB
english, 1999