Wave Polymerization During Vapor Deposition of Porous...

MRS Proceedings 1999 / 1 Vol. 565

Wave Polymerization During Vapor Deposition of Porous Parylene-N Dielectric Films

Erjavec, James, Sikita, John, Beaudoin, Stephen P., Raupp, Gregory B.
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Volume:
565
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-565-23
Date:
January, 1999
File:
PDF, 1.79 MB
english, 1999
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