Tribological Experiments Applied to Tungsten Chemical Mechanical Polishing
Bielmann, Marc, Mahajan, Uday, Singh, Rajiv K., Agarwal, Pankaj, Mischler, Stefano, Rosset, Eric, Landolt, DieterVolume:
566
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-566-97
Date:
January, 1999
File:
PDF, 1.29 MB
english, 1999