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Effect of Extended Defects on the Enhanced Diffusion of Phosphorus Implanted Silicon
Keys, P. H., Li, J. H., Heitman, E., Packan, P. A., Law, M. E., Jones, K. S.Volume:
568
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-568-199
Date:
January, 1999
File:
PDF, 1.46 MB
english, 1999