Nitrogen Implantation and Diffusion in Silicon

MRS Proceedings 1999 / 1 Vol. 568

Nitrogen Implantation and Diffusion in Silicon

Adam, Lahir Shaik, Law, Mark E., Dokumaci, Omer, Haddara, Yaser, Murthy, Cheruvu, Park, Heemyong, Hegde, Suri, Chidambarrao, Dureseti, Mollis, Steve, Domenicucci, Tony, Dziobkowski, Chester, Jones, Ke
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Volume:
568
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-568-277
Date:
January, 1999
File:
PDF, 240 KB
english, 1999
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