In Situ Design of Experiments for A Reactive Ion Etching Process
Galarza, Cecilia G., Klimecky, Pete, Khargonekar, Pramod P., Terry, Fred L.Volume:
569
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-569-165
Date:
January, 1999
File:
PDF, 381 KB
english, 1999