In Situ Spectroscopic Ellipsometry Studies of The...

MRS Proceedings 1999 / 1 Vol. 569

In Situ Spectroscopic Ellipsometry Studies of The Interaction Process of Ethene With Si Surfaces During Sic Formation

Wöhner, T., Stauden, Th., Cimalla, V., Eichhorn, G., Schaefer, J.A., Pezoldt, J.
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Volume:
569
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-569-95
Date:
January, 1999
File:
PDF, 1.47 MB
english, 1999
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