![](/img/cover-not-exists.png)
Annealing of Ion Implantation Damage in SiC Using a Graphite Mask
Thomas, Chris, Taylor, Crawford, Griffin, James, Rose, William L., Spencer, M. G., Capano, Mike, Rendakova, S., Kornegay, KevinVolume:
572
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-572-45
Date:
January, 1999
File:
PDF, 839 KB
english, 1999