Ion Beam Processing of Carbon Nitride Thin Films

MRS Proceedings 1999 / 1 Vol. 585

Ion Beam Processing of Carbon Nitride Thin Films

Wu, Richard L.C., Lanter, William C., Wrbranek, John, Kosel, Peter B., Dejoseph, Charles A.
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Volume:
585
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-585-245
Date:
January, 1999
File:
PDF, 319 KB
english, 1999
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