Molecular Dynamics Simulations of Growth and Low-Energy Ion Polishing of Thin Molybdenum Films for EUV Multilayer Mirrors
Klaver, Peter, Goedheer, Wim, Bijkerk, Fred, Thijsse, Barend J.Volume:
585
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-585-305
Date:
January, 1999
File:
PDF, 1.67 MB
english, 1999