Porous SiC Substrate Materials for High-Quality Epitaxial...

Porous SiC Substrate Materials for High-Quality Epitaxial and Bulk Growth

Mynbaeva, M., Savkina, N., Zubrilov, A., Seredova, N., Scheglov, M., Titkov, A., Tregubova, A., Lebedev, A., Kryzhanovski, A., Kotousova, I., Dmitriev, V.
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Volume:
587
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-587-o8.6
Date:
January, 1999
File:
PDF, 264 KB
english, 1999
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