Correlation Between Gate Induced Drain Leakage and Plasma...

MRS Proceedings 1999 / 1 Vol. 592

Correlation Between Gate Induced Drain Leakage and Plasma Induced Interface Traps

Ma, Siguang, Zhang, Yaohui, Li, M. F., Li, Weidan, Wang, J. L. F., Yen, Andrew C., Sheng, George T. T.
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Volume:
592
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-592-117
Date:
January, 1999
File:
PDF, 566 KB
english, 1999
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