Photoluminescence Characterization of Defects in Thermal...

Photoluminescence Characterization of Defects in Thermal Oxide

Nishikawa, Hiroyuki, Stathis, James H.
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Volume:
592
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-592-289
Date:
January, 1999
File:
PDF, 679 KB
english, 1999
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