Effect of Argon Addition on Nitrogen Containing Carbon...

MRS Proceedings 1999 / 1 Vol. 593

Effect of Argon Addition on Nitrogen Containing Carbon Films Prepared by Hot Carbon Filament CVD

Watanabe, Yoshihisa, Ohnita, Shinobu, Kitazawa, Nobuaki, Nakamura, Yoshikazu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
593
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-593-425
Date:
January, 1999
File:
PDF, 642 KB
english, 1999
Conversion to is in progress
Conversion to is failed