Nanomechanical Properties of Amorphous Carbon and Carbon...

MRS Proceedings 1999 / 1 Vol. 594

Nanomechanical Properties of Amorphous Carbon and Carbon Nitride Thin Films Prepared by Shielded Arc Ion Plating

Tajima, N., Saze, H., Sugimura, H., Takai, O.
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Volume:
594
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-594-319
Date:
January, 1999
File:
PDF, 932 KB
english, 1999
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