Ion Implantation and Misfit Dislocation Formation in...

MRS Proceedings 1999 / 1 Vol. 594

Ion Implantation and Misfit Dislocation Formation in P/P+Silicon

Feichtinger, Petra, Fukuto, Hiroaki, Sandhu, Rajinder, Poust, Benjamin, Goorsky, Mark S.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
594
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-594-37
Date:
January, 1999
File:
PDF, 938 KB
english, 1999
Conversion to is in progress
Conversion to is failed