Fabrication of GaN with Buried Tungsten (W) Structures...

MRS Proceedings 1999 / 1 Vol. 595

Fabrication of GaN with Buried Tungsten (W) Structures Using Epitaxial Lateral Overgrowth (ELO) via LP-MOVPE

Miyake, Hideto, Yamaguchi, Motoo, Haino, Masahiro, Motogaito, Atsushi, Hiramatsu, Kazumasa, Nambu, Shingo, Kawaguchi, Yasutoshi, Sawaki, Nobuhiko, Iyechika, Yasushi, Maeda, Takayoshi, Akasaki, Isamu
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Volume:
595
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-595-f99w2.3
Date:
January, 1999
File:
PDF, 160 KB
english, 1999
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