![](/img/cover-not-exists.png)
Effects of In-Situ DC-Bias on the Composition, Microstructures and Dielectric Properties of RF Magnetron Reactive Sputtered (Ba,Sr)TiO3 Films
Chan, Wen-Hao, Shen, Hui-Ling, Chou, Lih-Hsin, Wang, Jinn-Lung, Tsai, Jyi-ChingVolume:
596
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-596-43
Date:
January, 1999
File:
PDF, 420 KB
english, 1999