Micromachined Polysilicon Resonating Xylophone Bar Magnetometer: Resonance Characteristics
Lamb, J. L., Wickenden, D. K., Champion, J. L., Givens, R. B., Osiander, R., Kistenmacher, T. J.Volume:
605
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-605-211
Date:
January, 1999
File:
PDF, 950 KB
english, 1999