Development of a MEMS Xylophone Bar Magnetometer Using...

Development of a MEMS Xylophone Bar Magnetometer Using Optical Interferometry for Detection

Miragliotta, Joseph, Osiander, R., Champion, J. L., Oursler, D. A., Kistenmacher, T.J.
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Volume:
605
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-605-217
Date:
January, 1999
File:
PDF, 1.02 MB
english, 1999
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