Temperature-Dependent Coefficient of Thermal Expansion of...

MRS Proceedings 1999 / 1 Vol. 605

Temperature-Dependent Coefficient of Thermal Expansion of Silicon Nitride Films Used in Microelectromechanical Systems

Bargmann, Melissa, Kumpel, Amy, Tada, Haruna, Nieva, Patricia, Zavracky, Paul, Miaoulis, Loannis N., Wong, Peter Y.
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Volume:
605
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-605-235
Date:
January, 1999
File:
PDF, 1.12 MB
english, 1999
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