Deposition and Characterization of In-Situ Boron Doped Polycrystalline Silicon Films for Microelectromechanical Systems Applications
McMahon, J. J., McMahon, J. J., Melzak, J. M., Zorman, C. A., Chung, J., Mehregany, M.Volume:
605
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-605-31
Date:
January, 1999
File:
PDF, 1.75 MB
english, 1999