Monomeric Chelated Amides of Aluminum and Gallium:...

MRS Proceedings 1999 / 1 Vol. 606

Monomeric Chelated Amides of Aluminum and Gallium: Volatile, Miscible Liquid Precursors for CVD

Barry, Seàn T., Gordon, Roy G., Wagner, Valerie A.
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Volume:
606
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-606-83
Date:
January, 1999
File:
PDF, 438 KB
english, 1999
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