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Increase of Hydrogen-Radical Density and Improvement of The Crystalline Volume Fraction of Microcrystalline Silicon Films Prepared by Hot-Wire Assisted Pecvd Method
Yoshida, Norimitsu, Itoh, Takashi, Inouchi, Hiroki, Harada, Hidekuni, Inagaki, Katsuhiko, Yamana, Noriyuki, Yamamoto, Kanta, Nonomura, Shuichi, Nitta, ShojiVolume:
609
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-609-a19.3
Date:
January, 2000
File:
PDF, 124 KB
english, 2000