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Nucleation Mechanism of Microcrystalline Silicon Studied by Real Time Spectroscopic Ellipsometry and Infrared Spectroscopy
Fujiwara, Hiroyuki, Toyoshima, Yasutake, Kondo, Michio, Matsuda, AkihisaVolume:
609
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-609-a2.1
Date:
January, 2000
File:
PDF, 1.21 MB
english, 2000